Equipment Front End Module (EFEM) - Semiconductor Wafer Handling Automation
Kensington Laboratories offers Performix which is a 300mm equipment front-end module (EFEM) having wafer handling environment. Performix combines the best of newly developed advanced robotic technologies and industry-proven equipment. It is a self-contained mini-environment which utilizes precision robotics in an ultra-clean wafer handling area. SEMI compliant and configured for two to four BOLTS-compliant ports, the Performix design facilitates interfacing among fab equipment.
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