Organic Field Effect Transistor (OFET) Substrate Production from Silicon (Si/SiO2) Wafers
A short introduction to how we are manufacturing OFET test substrates from commercially available silicon wafers. Field effect transistors (FET) are a way of switching current flows.
This work is part of a series on manufacturing substrates inducing the following videos:
• • Organic Field Effect Transistor (OFET) Sub...
• • Self-assembled monolayer - SAM - passivati...
• • Dielectric Deposition in OFETS: A guide to...
• • OFET Meauring and Contacting: A guide to O...
Published as part of my work in the Dynamic System Chemistry group https://www.pklab.cz/
Files used
3D print files: https://www.thingiverse.com/thing:6922179
Equipment used not exhaustive
Sample holder and mask https://www.ossila.com/products/
ofet-evaporation-stack-low-density
Turbo pump
https://www.agilent.com/en/product/vacuum
-technologies/turbo-pumps-controllers/turbo-pumps/
twistorr-305-ic-turbo-pump-with-integrated-controller
Rotary vane pump https://www.verkon.cz/
vyveva-rotacni-olejova-lavat-dvoukomorova/
Vaccum chamber - custom made http://www.vakuum.cz/3a.html
Vaccum sensor https://www.pfeiffer-vacuum.com/global/en/
shop/products/fa30be51-9823-41a4-bea5-797f00e59be8
https://www.pfeiffer-vacuum.com/global/en
/shop/products/6705e9a5-e527-44c7-bcdc-8bf52993ae71
Cucible 72-C9-BN https://www.microtonano.com/Evaporation-
crucibles-for-high-vacuum-thin-film-deposition-basket-crucible-
heaters-RDMathis.php
Heating element 71-ME18AW https://www.microtonano.com/low-power-micro
-electronics-evaporation-sources-boats-caps-filaments.php?#a71ME18AWB
Silicon wafers used are Si+SiO2 4 inch wafers from microchemical. They are 525 um thick, 100 crystal face, 1 side poished, P-type - boron doped, total thicknes variation less than 10uM, 1-10 ohm cm resistivity and 100 or 300 nm SiO2 thickness. This type of wafer is no longer stocked by the supplier.
Intro and outro music
Suspension: Mellow Electro-Ambient Soundscape by kjartan_abel -- https://freesound.org/s/531854/ -- License: Attribution 4.0 @KjartanAbel
/ @kjartanabel