SUSS MicroTec's proprietary AltaSpray coating technology
http://www.suss.com/en/products-solut...
SUSS MicroTec's proprietary AltaSpray coating technology is a unique resist deposition method that is capable of producing highly uniform resist films on different 3-D microstructures. The ability to produce conformal resist coatings on severe topography makes AltaSpray the ideal choice for R&D, MEMS, 3D-integration and Wafer Level Packaging applications like 3D image sensor packaging.