Enhanced Compositional Mapping on the SEM Through Combined EDS-WDS Mapping in AZtecWave

Опубликовано: 25 Октябрь 2024
на канале: Oxford Instruments
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This video presents how elemental mapping using a fully focussing Rowland circle, wavelength dispersive spectrometer (WDS / WDX) can enhance compositional mapping with Energy Dispersive Spectrometry (EDS / EDX), by enabling accurate mapping of elements present in trace concentrations or impacted by X-ray peak overlaps in the EDS spectrum (https://nano.oxinst.com/products/wds/).

This is illustrated with a WDS-EDS dataset collected from a steel sample containing multiphase inclusions, which was acquired using functionality that is coming soon to the AZtecWave software for combined WDS and EDS mapping (https://nano.oxinst.com/aztecwave).