Helium Leak detection, Electrostatic Chuck clamping in RIE (Reactive Io Etching)
Do you wonder, How one measures the backpressure He leaks in RIE. Do You know how the Electrostatic chuck works, if not then please watch this video.
Do you wonder, How one measures the backpressure He leaks in RIE. Do You know how the Electrostatic chuck works, if not then please watch this video.