【LODAS Series】 Defect Inspection Unit
【Products certified as "Made in Shinagawa" 2020】
LAZIN has developed the LODAS Series Laser Defect Inspection Unit, which can detect defects on the front surface, interior, and back surface of transparent glass during a single semiconductor photomask defect inspection using laser light.
https://biz.nikkan.co.jp/newscast/202...
◆LODAS Series
Defect Inspection Unit
◆LAZIN CO., LTD.
http://www.lazin.jp/
◆Made in SHINAGWA
https://www.mics.city.shinagawa.tokyo...
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LAZIN has developed the LODAS Series Laser Defect Inspection Unit, which can detect defects on the front surface, interior, and back surface of transparent glass during a single semiconductor photomask defect inspection using laser light.
Conventional inspection equipment can only inspect front surfaces. People must conduct manual visual inspections to find defects in the interior or on the back surface.
LAZIN has greatly increased efficiency by developing inspection equipment that can inspect the front surface, interior, and back surface during a single inspection.
Also included in this unit is technology for high-speed scanning of the object surface by generating 4,000 laser lines per second using a multifaced mirror rotating at high speed to guide the laser light and improve inspection speed.
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The more sensors there are that collect scattered light, the fewer detection omissions there are.
LAZIN focused on this by using three sensors for transmitted scattered light, reflected scattered light, and the confocal to enable detection in all directions to reduce detection omissions.
A fully automatic laser defect inspection unit that can operate 24 hours a day has been added to the compact, low-cost LODAS Series.
One of our customers requested that we add a robot to the desktop unit they were using to conduct
inspections 24 hours a day, so we developed a fully automated unit.
Up to now it took about 7 minutes to inspect one photomask.
We were able to get that down to 4 minutes using automated conveyance.
In this way we want to continue developing the things our customers want.
LAZIN CO., LTD. plans to establish distributors in Taiwan, China, and South Korea to expand sales activities in mainly Asia.
For the LODAS Series Laser Defect Inspection Unit we will continue to pursue technological development to achieve even greater efficiency and accuracy.